Microelectronic test structures for CMOS technology

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Bibliographic Details
Author / Creator: Bhushan, Manjul.
Other Authors / Creators:Ketchen, Mark B.
Format: Electronic eBook
Language:English
Imprint: New York : Springer, [2011]
Subjects:
Online Access:Available in Springer Engineering eBooks 2011 English/International.
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100 1 |a Bhushan, Manjul. 
245 1 0 |a Microelectronic test structures for CMOS technology  |h [electronic resource] /  |c Manjul Bhushan, Mark B. Ketchen. 
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504 |a Includes bibliographical references and index. 
650 0 |a Metal oxide semiconductors, Complementary  |x Testing. 
700 1 |a Ketchen, Mark B. 
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776 1 |t Microelectronic test structures for CMOS technology /  |w (DLC)2011934043 
856 4 0 |3 Full text available  |z Available in Springer Engineering eBooks 2011 English/International.  |u https://ezproxy.wellesley.edu/login?url=https://link.springer.com/10.1007/978-1-4419-9377-9